| Companies |
Materials/devices |
- Si substrate, SOI substrate, glass substrate, photosensitizer, package materials, optical materials, film materials, bonding materials, getter materials, etc.
|
| Instruments/devices |
- Microsensors : Inertial sensor, temperature sensor, pressure sensor, infrared sensor, magnetic sensor, optical sensor, gas sensor, biosensor, wireless sensing module, etc.
- Wearable devices : Microbattery, flexible battery, energy harvesting, flexible substrate, flexible sensor module, low-power energy/signal transmission module, etc.
- Actuators :Microscanner, microresonator, switch, micromotor, inkjet head, small stage, micropump, haptic device, etc.
- Manual components : Variable capacitor, microinductor, microfluidic channel, etc.
|
| Modules/systems |
- Applied optical modules : Microscanner, variable lens, optical attenuator, photonics platform, LCoS, DLP, micro lens, optical film, optical zoom lens, etc.
- Applied biotechnology : PoC module, drug delivery system, diagnostic analysis module, etc.
- Applied RF : Front-end module, switchable antenna, etc.
- Other applied systems : Energy generation and transmission system, health care system, etc.
|
| Equipment |
Measurement and analysis |
- Modeling : Design simulation and software
- Measuring and analysis equipment : Microscope, size measurement, applied laser measuring instrument, qualitative/quantitative material analyzer, micro texture analyzer
|
Processing
equipment
and
services |
- Parts and equipment for substrate processing, ultra-precision-machined products and services, precision bonding equipment and processing services, etc.
- Semiconductor fabrication equipment (deposition, pattern etching), packaging equipment, MEMS fabrication services, plating equipment, etc.
|
| Institutions |
Research centers
Universities Project centers |
- Research centers, universities and project centers in the field of micro/nanosystems :Exhibit the latest research accomplishments and applied technology projects (materials, devices, system manufacturing, improved technologies, etc.)
- Government project centers related to micro/nanosystems
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| Public institutions |
- Foundry services required for the manufacturing of micro/nano systems
- Fab Centers
- Various services related to microsystems and nanosystems (indirect use service, design, performance assessment, viewing service, etc.)
- Government’s project centers related to smart sensors
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